Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 250: | Line 250: | ||
== Process information == | == Process information == | ||
=== | ===Process notation=== | ||
Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|'''HERE''']] to find a short description | Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|'''HERE''']] to find a short description. | ||
===Hardware changes=== | ===Hardware changes=== | ||