Specific Process Knowledge/Lithography/4562: Difference between revisions
Appearance
| Line 9: | Line 9: | ||
==Resist description== | ==Resist description== | ||
AZ 4562 is a positive UV photoresist for thick coatings (5 - | AZ 4562 is a positive UV photoresist for thick coatings (5 - 10 µm). | ||
==Priming== | ==Priming== | ||