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Specific Process Knowledge/Lithography/4562: Difference between revisions

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==Resist description==
==Resist description==
AZ 4562 is a positive UV photoresist for thick coatings (5 - 20 µm).
AZ 4562 is a positive UV photoresist for thick coatings (5 - 10 µm).


==Priming==
==Priming==