Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Back Side Alignment== | ==Back Side Alignment== | ||
<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | |||
'''Overlay accuracy (spec):''' 1.0 µm | '''Overlay accuracy (spec):''' 1.0 µm | ||