Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 670: | Line 670: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2" align="center"|Align-flip180-align, 3 points <br/> | |rowspan="2" align="center"|Align-flip180-align, 3 points <br/> 375 nm | ||
|'''X''' | |'''X''' | ||
| -0. | | -0.625 ±0.125 | ||
|rowspan="2" align="center"|0. | |rowspan="2" align="center"|0.5 µm verniers | ||
Taran May 2019 | Taran May 2019 | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| -0. | | -0.75 ±0.125 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2" align="center"|Align-flip180-align, 3 points <br/> | |rowspan="2" align="center"|Align-flip180-align, 3 points <br/> 405 nm | ||
|'''X''' | |'''X''' | ||
| -0. | | -0.625 ±0.125 | ||
|rowspan="2" align="center"|0. | |rowspan="2" align="center"|0.5 µm verniers | ||
Taran May 2019 | Taran May 2019 | ||
| Line 692: | Line 692: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| -0. | | -0.375 ±0.125 | ||
|- | |- | ||
| Line 698: | Line 698: | ||
|rowspan="2" align="center"|KOH-window, ? points | |rowspan="2" align="center"|KOH-window, ? points | ||
|'''X''' | |'''X''' | ||
| 0. | | 0.0 ±0.0 | ||
|rowspan="2" align="center"|Not performed yet | |rowspan="2" align="center"|Not performed yet | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| 0. | | 0.0 ±0.0 | ||
|} | |} | ||