Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
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To be sure the Overview camera can be used to locate the first alignment mark, it is advised to use a mark in the bottom left portion (3<sup>rd</sup> quadrant) of the design as mark 1. <br> | To be sure the Overview camera can be used to locate the first alignment mark, it is advised to use a mark in the bottom left portion (3<sup>rd</sup> quadrant) of the design as mark 1. <br> | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align=" | {| cellpadding="2" style="border: 2px solid darkgray;" align="center" | ||
! width="320" | | ! width="320" | | ||
! width="320" | | ! width="320" | | ||
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|+'''Camera views during alignment on Aligner: Maskless 03. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.''' | |+'''Camera views during alignment on Aligner: Maskless 03. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.''' | ||
|- border="0" | |- border="0"; align="center" | ||
|[[Image:MLA150 TSA Overview.JPG|300px]] | |[[Image:MLA150 TSA Overview.JPG|300px]] | ||
|[[Image:MLA150_BSA_Backside.JPG|300px]] | |[[Image:MLA150_BSA_Backside.JPG|300px]] | ||