Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

@@ Line 446: / Line 446: @@
 '''Camera field of view (W x H):''' <br>
-'''High Res''' 64µm x 48µm <br>
+'''High Res''' 190 µm x 140 µm <br>
-'''Low Res''' 213µm x 160µm <br>
+'''Low Res''' 640 µm x 480 µm <br>
-'''Overview''' 13mm x 10mm
+'''Overview''' 12 mm x 9 mm
 '''Accessible stage coordinates:''' <br>
@@ Line 467: / Line 467: @@
 |- align="center"
-| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3mm in diameter, the alignment mark is 300µm. The blue cross-hair is ~400µm. ||  Low Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20µm wide. The blue cross-hair is ~7µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the central cross are 3µm wide. The blue cross-hair is ~2µm.
+| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3 mm in diameter, the alignment mark is 300 µm. The blue cross-hair is ~400 µm. ||  Low Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20 µm wide. The blue cross-hair is ~7 µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the central cross are 3 µm wide. The blue cross-hair is ~2 µm.
 |}