Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
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-16000 | -46000 | um | 2000 | um | TARAN DTU Nanolab 20190320 | -16000 | -46000 | um | 2000 | um | TARAN DTU Nanolab 20190320 | ||
This produces a | This produces a 2 mm high, approximately 32 mm long wafer ID at the flat of a 100 mm wafer. Some special characters are not allowed (eg. ';'). | ||
<br clear="all" /> | <br clear="all" /> | ||