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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

Jehem (talk | contribs)
Jehem (talk | contribs)
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-16000 | -46000 | um | 2000 | um | TARAN DTU Nanolab 20190320
-16000 | -46000 | um | 2000 | um | TARAN DTU Nanolab 20190320


This produces a 2mm high, approximately 32mm long wafer ID at the flat of a 4" wafer. Some special characters are not allowed (e.g. ';').
This produces a 2 mm high, approximately 32 mm long wafer ID at the flat of a 100 mm wafer. Some special characters are not allowed (eg. ';').


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