Jump to content

Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Jehem (talk | contribs)
Jehem (talk | contribs)
Line 430: Line 430:


==Top Side Alignment==
==Top Side Alignment==
<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span>


'''Overlay accuracy (spec):''' 0.5µm
'''Overlay accuracy (spec):''' 0.5µm