Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
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===Result of a PEC process=== | ===Result of a PEC process=== | ||
Once a PEC node has been applied to a design and executed the design is broken into a number of '''shot ranks'''. Each shot rank has a specific dose associated with it. The doses and and how they are applied to the pattern can be seen in the pattern viewer by clicking on the '''Color by Dose''' button and selecting the '''Dose''' tree. | |||
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Dose modulation as generated by a PEC process. | |||
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== Export to V30 == | == Export to V30 == | ||