Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 118: | Line 118: | ||
=Pattern preparation= | =Pattern preparation= | ||
In order to expose a pattern it must be converted to V30 format (JEOL52 V3.0) using Beamer. Beamer can read several different file formants, we recommend using GDS as your input format. Beamer can do a lot of different operations on a pattern to better optimise it for writing. In this | In order to expose a pattern it must be converted to V30 format (JEOL52 V3.0) using Beamer. Beamer can read several different file formants, we recommend using GDS as your input format. Beamer can do a lot of different operations on a pattern to better optimise it for writing. In this tutorial we will skip all of these operations and simply export the GDS pattern to a V30 file. For more advanced functionality and pattern preparation please refer to our Beamer pattern preparation guide. | ||
Beamer uses a node based system where each node performs an action on the pattern. In this simple example we will just have an import node to import our GDS file and connect it to an export node to output it as V30. The setup is thus as simple as can be and will look like below, the left hand side shows the simple node setup while the right side shows the pattern which in this case is a DTU logo. | Beamer uses a node based system where each node performs an action on the pattern. In this simple example we will just have an import node to import our GDS file and connect it to an export node to output it as V30. The setup is thus as simple as can be and will look like below, the left hand side shows the simple node setup while the right side shows the pattern which in this case is a DTU logo. | ||