Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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. | '''ACHK''' shows how patterns are placed on the substrate. It will however only show the bounding box of the pattern. In this case the pattern is very small compared to the 4" wafer and thus one has to zoom into the center to see the 10 instances of the design. Image: Thomas Pedersen. | ||
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