Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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The '''EXCH EVAC''' switch must always be left unchecked as in this example. If it is toggled on the exchange chamber (load lock) will be pumped down after a carry out operation and the next carry in operation must then wait for the pump down (15 min) before it can be executed. Always leave '''EXCH EVAC''' off. | The '''EXCH EVAC''' switch must always be left unchecked as in this example. If it is toggled on the exchange chamber (load lock) will be pumped down after a carry out operation and the next carry in operation must then wait for the pump down (15 min) before it can be executed. Always leave '''EXCH EVAC''' off. | ||
Prior to exposure the chosen cassette has to be transferred from the cassette transfer system and to the main chamber. This is done from the “Loader” module by first moving out the current cassette from the main chamber and then moving in the cassette used for exposure. Carry out takes about 4 minutes while carry in takes about 15 min since the exchange chamber has to pump down to vacuum. | Prior to exposure the chosen cassette has to be transferred from the cassette transfer system and to the main chamber. This is done from the “Loader” module by first moving out the current cassette from the main chamber and then moving in the cassette used for exposure. Carry out takes about 4 minutes while carry in takes about 15 min since the exchange chamber has to pump down to vacuum. The procedure is | ||
*Make sure '''EXCH EVAC''' is toggled off | |||
*Press '''Carry out''' to move the current cassette back to the shelf it was loaded from | |||
*After about 4 min the status light will be solid green, select the cassette to use | |||
*Press '''Carry in''' | |||
*The system will be ready after about 15 min | |||
=System calibration= | =System calibration= | ||