Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

Revision as of 12:50, 22 February 2023 view source Thope (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231 2,179 edits →Sample mounting ← Older edit		Revision as of 13:05, 22 February 2023 view source Thope (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231 2,179 edits →Sample mounting Newer edit →
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	*Set the system back to "Remote" operation		*Set the system back to "Remote" operation


			Once the cassette is placed up-side down on the preparation table the slot cover can be removed by pressing down and rotating the spring loaded locking mechanism. The substrate can be placed in the slot using the vacuum tweezer found on the table. As the cassette is up-side down, the substrate must be loaded with resist side down.