Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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=Sample mounting= | =Sample mounting= | ||
The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. For more information on available cassettes and their specifications please refer to the [[Specific Process Knowledge/Lithography/EBeamLithography/Cassettes|cassette specifications page | The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. For more information on available cassettes and their specifications please refer to the [[Specific Process Knowledge/Lithography/EBeamLithography/Cassettes|JEOL 9500 cassette specifications page.]] | ||
For the tutorial job we are using a 4" wafer and hence it must be mounted in one of the 4” cassettes, in this case the 4" aluminium cassette (BM2P-011). | For the tutorial job we are using a 4" wafer and hence it must be mounted in one of the 4” cassettes, in this case the 4" aluminium cassette (BM2P-011). | ||