Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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=Job file verification= | =Job file verification= | ||
To ensure that the pattern and exposure parameters are correct | To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. This can be done using the '''ACHK''' program found on the '''Analysis''' pane should always do a brief verification of the content of the .mgn file. From the right hand side of desktop two click on the “ACHECK” tool. From the window opening up choose “File” -> “Open” and open your magazine file. | ||
=Sample mounting= | =Sample mounting= | ||