Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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Much more information on various commands in SDF/JDF files are available in the SDF and JDF file manual. [link] | Much more information on various commands in SDF/JDF files are available in the SDF and JDF file manual. [link] | ||
= | =Moving job files to exposure system= | ||
At this stage we have a V30 file containing the pattern data and an SDF and JDF file describing the exposure parameters. These must be compiled into a magazine file (.mgn) which will completely define the exposure job. Magazine files are compiled directly on the control computer and hence the V30, SDF and JDF files have to be transferred to this computer using the FFFTP client available on the support PC. For first time use FFFTP has to be setup on your user account on the support PC. This is done by the following steps: | At this stage we have a V30 file containing the pattern data and an SDF and JDF file describing the exposure parameters. These must be compiled into a magazine file (.mgn) which will completely define the exposure job. Magazine files are compiled directly on the control computer and hence the V30, SDF and JDF files have to be transferred to this computer using the FFFTP client available on the support PC. For first time use FFFTP has to be setup on your user account on the support PC. This is done by the following steps: | ||
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*V30: /home/eb0/jeoleb/pattern/danchipv30 | *V30: /home/eb0/jeoleb/pattern/danchipv30 | ||
=Job file compilation= | |||
Once the files are transferred to the EBL control computer we can compile the files into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. Switch to desktop two, select the terminal window and write “schd -exptime sdffilename”. | Once the files are transferred to the EBL control computer we can compile the files into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. Switch to desktop two, select the terminal window and write “schd -exptime sdffilename”. | ||