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== Etching using the dry etch technique AOE (Advanced oxide etch) ==
== Etching using the dry etch technique AOE (Advanced oxide etch) ==
[[Image:AOE.jpg|300x300px|thumb|AOE: positioned in cleanroom B-1, photo: DTU Nanolab internal]]
[[Image:AOE.jpg|300x300px|thumb|AOE: positioned in cleanroom B-1, {{photo1}}]]


Name: M/PLEX ICP - AOE (Advanced Oxide Etcher) <br>
Name: M/PLEX ICP - AOE (Advanced Oxide Etcher) <br>
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