Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 753: | Line 753: | ||
The technical specification and the general outline of the equipment can be found in LabManager. | The technical specification and the general outline of the equipment can be found in LabManager. | ||
The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=259 LabManager] - '''requires login''' | |||
<br clear="all" /> | <br clear="all" /> | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||