Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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==KS Aligner== | ==KS Aligner== | ||
[[Image:KSAligner in E-4.jpg|300x300px|thumb|The KS Aligner is placed in E-4]] | [[Image:KSAligner in E-4.jpg|300x300px|thumb|The KS Aligner is placed in E-4]] | ||
SUSS Mask Aligner MA6 is designed for high resolution photolithography. | SUSS Mask Aligner MA6 is designed for high resolution photolithography. | ||
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'''Training videos: [https://www.youtube.com/watch?v=o8IBtfQHNzU Operation] [https://www.youtube.com/watch?v=rvUuXYgw-xU Alignment]''' (on Aligner: MA6-2, but KS Aligner is the same model) | '''Training videos: [https://www.youtube.com/watch?v=o8IBtfQHNzU Operation] [https://www.youtube.com/watch?v=rvUuXYgw-xU Alignment]''' (on Aligner: MA6-2, but KS Aligner is the same model) | ||
The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=44 LabManager] - '''requires login''' | |||
===Exposure dose=== | ===Exposure dose=== | ||
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*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner] - '''requires login'''<br> | ||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=44 The newest QC data for KS Aligner] | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=44 The newest QC data for KS Aligner] - '''requires login''' | ||
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