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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano10: Difference between revisions

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== The nano1.0 recipe ==
== The nano1.0 recipe ==
<!--foo-->
{{Template:Author-jmli1}}
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{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1"  
|+ '''Recipe nano1.0'''
|+ '''Recipe nano1.0'''