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==Material from SPTS==
==Material from SPTS==
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs|Hardware and process applications]]


*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|Miscellaneous information]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|Miscellaneous information]]
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