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Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Line 13: Line 13:
*Spin coating
*Spin coating
*Soft baking
*Soft baking
'''Features of Spin Coater: Gamma UV'''
'''Features of Spin Coater: Gamma UV'''
*Cassette-to-cassette wafer handling
*Cassette-to-cassette wafer handling
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