Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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[[image:Gamma_4M_-_E-beam_&_UV_full.JPG|300x300px|thumb|Spin Coater: Gamma e-beam & UV in E-5.]] | [[image:Gamma_4M_-_E-beam_&_UV_full.JPG|300x300px|thumb|Spin Coater: Gamma e-beam & UV in E-5.]] | ||
The user manual, user APV, and contact information can be found in LabManager: | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=417 Spin Coater: Gamma e-beam & UV] - '''requires login''' | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=417 Spin Coater: Gamma e-beam & UV] - '''requires login''' | ||
Additional information about the spin coater and processes can be found in Labadviser: | |||
[http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_E-beam_and_UV Spin Coater: Gamma e-beam & UV] | [http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_E-beam_and_UV Spin Coater: Gamma e-beam & UV] | ||