Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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[[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in Spin Coater: Gamma UV in E-5.]] | [[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in Spin Coater: Gamma UV in E-5.]] | ||
The user manual, user APV, and contact information can be found in LabManager: | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Spincoater: Gamma UV] - '''requires login''' | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Spincoater: Gamma UV] - '''requires login''' | ||