Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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[[Image:HMDS2.jpg|300x300px|thumb|The Oven: HMDS 2 oven is located in E-5.]] | [[Image:HMDS2.jpg|300x300px|thumb|The Oven: HMDS 2 oven is located in E-5.]] | ||
'''The user manual, user APV, and contact information can be found in LabManager:''' | '''The user manual, user APV, and contact information can be found in LabManager:''' [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=358 Oven: HMDS 2] - '''requires login''' | ||
'''Process information:''' | '''Process information:''' | ||
*Recipe 1: baseline prime process with 5 min HMDS priming time | *Recipe 1: baseline prime process with 5 min HMDS priming time | ||