Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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The KS Aligner has an i-line notch filter installed. This results in an exposure light peak around 365nm with a FWHM of 7nm. | The KS Aligner has an i-line notch filter installed. This results in an exposure light peak around 365nm with a FWHM of 7nm. | ||
===Quality Control (QC)=== | |||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Control (QC) for KS Aligner''' | |bgcolor="#98FB98" |'''Quality Control (QC) for KS Aligner''' | ||