Specific Process Knowledge/Lithography/Baking

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Comparing baking methods

	Spray coater hotplate	SU8 hotplates 1, 2 and 3	Small benchtop hotplates	Gamma hotplates	Oven 90C	Oven: 110C - 250C	Oven 250C
Purpose	Adjustable temperature, contact bake Soft bake PEB Hard bake	Programmable, ramped contact bake Soft bake of SU-8 PEB of SU-8	Hotplate: 90-110C: Programmable, contact bake Soft bake PEB Labspin hotplates: Adjustable temperature, contact bake Soft bake PEB Hard bake	Recipe dependent temperature, contact or proximity bake Soft bake PEB Hard bake	Manual convection bake Soft bake	Manual convection bake Hard bake Post-exposure bake	Manual convection bake Dehydration NO resist!
Temperature	Maximum 180°C Temperature with top-plate: Actual surface temperature = 0.9 * display value	Maximum 110°C	Hotplate: 90-110C: Maximum 120°C Return to 90°C after use Labspin hotplates: Maximum temperature is hotplate dependent Temperature with top-plate: Actual surface temperature = 0.9 * display value	Fixed at various recipe dependent temperatures	Fixed at 90°C	110 - 250°C Return to 110°C after use	Fixed at 250°C
Substrate size	Pieces 50 mm wafer 100 mm wafer 150 mm wafer 200 mm wafer	pieces 50 mm wafers 100 mm wafers 150 mm wafer 200 mm wafer	pieces (only Labspin hotplates) 50 mm wafers 100 mm wafers 150 mm wafer 200 mm wafer	100 mm wafers 150 mm wafers	100 mm wafers 150 mm wafers	100 mm wafers 150 mm wafers	100 mm wafers 150 mm wafers
Allowed materials	All substrates Film or pattern of all types	Silicon, glass, and polymer substrates Film or pattern of all types except type IV	Hotplate dependent. (All substrates and film or pattern of all types, unless otherwise noted on the hotplate)	Silicon and glass substrates	Silicon, glass, and polymer substrates Film or pattern of all types	Silicon, glass, and high Tg polymer substrates Film or pattern of all types	Silicon, glass, and high Tg polymer substrates Film or pattern of all types except resist|
Restrictions (Not allowed)		III-V, copper, steel substrates Pb, Te films	Hotplate dependent. Any restrictions will be noted on the hotplate.		III-V, copper, steel substrates	III-V, low Tg polymer, copper, steel substrates	III-V, low Tg polymer, copper, steel substrates Resist is not allowed
QC	https://labmanager.dtu.dk/view_binary.php?type=data&mach=293	Hotplate 1: https://labmanager.dtu.dk/view_binary.php?type=data&mach=122 Hotplate 2: https://labmanager.dtu.dk/view_binary.php?type=data&mach=124 Hotplate 3: https://labmanager.dtu.dk/view_binary.php?type=data&mach=453	Hotplate: 90-110C: https://labmanager.dtu.dk/view_binary.php?type=data&mach=336 Spin coater: Labspin 02: https://labmanager.dtu.dk/view_binary.php?type=data&mach=362 Spin coater: Labspin 03: https://labmanager.dtu.dk/view_binary.php?type=data&mach=387	Spincoater: Gamma ebeam & UV: http://labmanager.dtu.dk/view_binary.php?fileId=4431 Spincoater: Gamma UV: http://labmanager.dtu.dk/view_binary.php?fileId=4432 Developer: TMAH UV-lithography: http://labmanager.dtu.dk/view_binary.php?fileId=4434 Spincoater: Süss stepper: http://labmanager.dtu.dk/view_binary.php?fileId=4433 Developer: Stepper: http://labmanager.dtu.dk/view_binary.php?fileId=4435

Hotplates

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Hotplate: 90-110C

Hotplate: 90-110C located in C-1

Hotplate: 90-110C is used for baking of 2" - 6" wafers. Do not exceed 120°C.

The user manual, and contact information can be found in LabManager: Hotplate: 90-110C

Hotplate 1 (SU8), Hotplate 2 (SU8) and Hoplate 3(SU8)

Hotplate 1 (SU8) and Hotplate 2 (SU8) situated in C-1

We have three dedicated SU-8 hotplates in C-1 and E-4.

Users can control the ramp-time, the baking temperature, and the baking time. In order to avoid thermal curing of SU-8 residues on the hotplates, they are temperature limited to 110°C.

The user manual, and contact information can be found in LabManager: Hotplate 1 (SU8) Hotplate 2 (SU8) Hotplate 3 (SU8)

Small benchtop hotplates

Model: Präzitherm PZ 28-2.

Contact bake only. Maximum temperature is hotplate dependent.

Most of these hotplates have been fitted with a top-plate in order to protect the original hotplate surface. With the top-plate, the set point of the controller must be adjusted in order to achieve the correct temperature during the bake:

Actual surface temperature = 0.9 * display value

• 
  Benchtop hotplate for Spray coater located in C-1
• 
  Benchtop hotplates for Labspins in E-5

Gamma hotplates

Hotplate modules in Spin Coater: Gamma UV.

Hotplate temperatures are recipe dependent.

Information about the Süss MicroTec Gamma tools can be found in labadviser:

• Spin Coater: Süss Stepper
• Developer: TMAH Stepper
• Developer TMAH UV-lithography
• Spin Coater: Gamma UV
• Spin Coater: Gamma e-beam & UV

Ovens

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Oven 90C

Oven 90C situated in C-1

The oven is mostly used for baking of several wafers at a time at 90 °C as a soft baking step after a spin coating of photoresist. For 1.5µm resist the baking time is 30 min. For most of the other resist thicknesses it is also 30 min.

The user manual, and contact information can be found in LabManager: Oven 90C

Oven: 110C - 250C

Oven: 110C - 250C situated in C-1

Variable temperature convection oven mostly used for baking of wafers as a hard baking step after development of photoresist.

The set-point can be varied, but should always be returned to 110°C after use.

The user manual, and contact information can be found in LabManager: Oven: 110C - 250C

Oven 250C for pretreatment

Oven 250C for pretreatment situated in C-1

See Oven 250C