Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 50: | Line 50: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
| | | | ||
!Date | |||
!Thickness | !Thickness | ||
!Dose | !Dose | ||
| Line 59: | Line 60: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="3"|AZ 5214E<br><span style="color:red">Old German version</span> | !rowspan="3"|AZ 5214E<br><span style="color:red">Old German version</span> | ||
|Long ago | |||
|1.5 µm | |1.5 µm | ||
|72 mJ/cm<sup>2</sup> | |72 mJ/cm<sup>2</sup> | ||
| Line 64: | Line 66: | ||
|rowspan="3"|Positive process | |rowspan="3"|Positive process | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Long ago | |||
|2.2 µm | |2.2 µm | ||
|80 mJ/cm<sup>2</sup> | |80 mJ/cm<sup>2</sup> | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Long ago | |||
|4.2 µm | |4.2 µm | ||
|160 mJ/cm<sup>2</sup> | |160 mJ/cm<sup>2</sup> | ||
| Line 74: | Line 78: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!AZ 4562<br><span style="color:red">Old German version</span> | !AZ 4562<br><span style="color:red">Old German version</span> | ||
|Long ago | |||
|10 µm | |10 µm | ||
|480-540 mJ/cm<sup>2</sup> | |480-540 mJ/cm<sup>2</sup> | ||
| Line 83: | Line 88: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="3"|AZ MiR 701<br><span style="color:red">Old PFOA containing version</span> | !rowspan="3"|AZ MiR 701<br><span style="color:red">Old PFOA containing version</span> | ||
|Long ago | |||
|1 µm | |1 µm | ||
|~180 mJ/cm<sup>2</sup> | |~180 mJ/cm<sup>2</sup> | ||
| Line 90: | Line 96: | ||
Preliminary results | Preliminary results | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Long ago | |||
|2 µm | |2 µm | ||
|~200 mJ/cm<sup>2</sup> | |~200 mJ/cm<sup>2</sup> | ||
|Single puddle, 60 s | |Single puddle, 60 s | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Long ago | |||
|4 µm | |4 µm | ||
|~400 mJ/cm<sup>2</sup> | |~400 mJ/cm<sup>2</sup> | ||
| Line 105: | Line 113: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!AZ nLOF 2020 | !AZ nLOF 2020 | ||
|Long ago | |||
|2 µm | |2 µm | ||
|100-120 mJ/cm<sup>2</sup> | |100-120 mJ/cm<sup>2</sup> | ||