Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
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|stepname= 0 Home matching | |stepname= 0 Home matching | ||
|generalbox= | |generalbox= | ||
|timebox= | |timebox=0 sec | ||
|presbox= | |presbox=100% | ||
|gasbox= | |gasbox= | ||
|RFbox= | |RFbox= - | ||
|matchbox= | |matchbox= 1/1 | ||
|miscbox= | |miscbox= | ||
}} | }} | ||