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Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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==Process knowledge==
==Process knowledge==


*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of go ld]]
*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of Au]]
 
*[[Specific_Process_Knowledge/Thin film deposition/Deposition of Tungsten/Sputtering of W in Sputter Coater 3|Deposition of W]]


==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters==
==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters==
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