Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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Revision as of 10:32, 26 August 2022 view source Pevo (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 2,329 edits →Phosphorous doping test after change of hardware ← Older edit		Revision as of 14:56, 21 November 2022 view source Pevo (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 2,329 edits No edit summary Newer edit →
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	The tube diameter is 16 cm and the length without ball valve is about 125 cm, and thus the volume is about 25 L. After the phosphorus pre-deposition step, the N<sub>2</sub> high flow (3 SLM) is on during the annealing/N<sub>2</sub> post purge, the cooling and a waiting step. The time for the waiting step is 30 minutes, so even if the annealing time is set to 0 minutes, and the furnace does not have to cool down, there will still be an N<sub>2</sub> high flow for 30 minutes to remove the POCl<sub>3</sub> from the furnace. The waiting time is the same in the abort recipe that is activated, if the "POCLNEW" recipe is aborted.		The tube diameter is 16 cm and the length without ball valve is about 125 cm, and thus the volume is about 25 L. After the phosphorus pre-deposition step, the N<sub>2</sub> high flow (3 SLM) is on during the annealing/N<sub>2</sub> post purge, the cooling and a waiting step. The time for the waiting step is 30 minutes, so even if the annealing time is set to 0 minutes, and the furnace does not have to cool down, there will still be an N<sub>2</sub> high flow for 30 minutes to remove the POCl<sub>3</sub> from the furnace. The waiting time is the same in the abort recipe that is activated, if the "POCLNEW" recipe is aborted.

	The "POCLNEW" recipe can just be modified with other temperatures an names.		The "POCLNEW" recipe can just be modified with other temperatures and names.