Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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===Some SEM profile images of the etched Au=== | ===Some SEM profile images of the etched Au=== | ||
{| border="1" cellspacing="1" cellpadding="2" | {| border="1" cellspacing="1" cellpadding="2" | ||
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[[image:IBE acceptance S18-AU-ZEP3.jpg|450x450px|thumb|center|s18-Au-ZEP3]] | [[image:IBE acceptance S18-AU-ZEP3.jpg|450x450px|thumb|center|s18-Au-ZEP3]] | ||
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[[image:IBE acceptance S18-AU-ZEP5.jpg|450x450px|thumb|center|s18-Au-ZEP5]] | [[image:IBE acceptance S18-AU-ZEP5.jpg|450x450px|thumb|center|s18-Au-ZEP5]] | ||
|} | |} | ||
==IBE Au etch with Ti mask== | ==IBE Au etch with Ti mask== | ||