Specific Process Knowledge/Characterization/Stress measurement: Difference between revisions
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If your thin film is crystalline, you can also measure stress using [[#Stress measurement using XRD|XRD]]. | If your thin film is crystalline, you can also measure stress using [[#Stress measurement using XRD|XRD]]. | ||
==Types of stress== | |||
A thin film can exhibit either compressive or tensile stress as illustrated by Figure 1: | |||
[[:File:berit-film-stress-illustration-cropped.png|upright=2|alt=A rectangle illustrates a substrate without stress. A downward curving section of a sphere with a red band on top illustrates a substrate with compressive stress due to a thinfilm. An upward curving section of a sphere with a green band on top illustrates a substrate with tensile stress.|right|thumb|Figure 1: Compressive and tensile stress (figure by Berit Herstrøm).]] | |||
==Stress measurement using a profilometer== | ==Stress measurement using a profilometer== | ||