Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano121: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
<!-- Ok, jmli 2020-0120 --> | <!-- Ok, jmli 2020-0120 --> | ||
<!-- Page reviewed 9/8-2022 jmli --> | |||
== The nano1.21 recipe == | == The nano1.21 recipe == | ||