Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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| [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1]] | | [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1]] | ||
| [[Image:Pegasus 2 operator.jpg |frame|x300px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1]] | | [[Image:Pegasus 2 operator.jpg |frame|x300px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1]] | ||
| [[Image:Peg3and4 front.JPG |frame|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations]] | | [[Image:Peg3and4 front 2.JPG |frame|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations]] | ||
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| align="center" | DRIE-Pegasus 1 | | align="center" | DRIE-Pegasus 1 | ||