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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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| [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1]]
| [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1]]
| [[Image:Pegasus 2 operator.jpg |frame|x300px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1]]
| [[Image:Pegasus 2 operator.jpg |frame|x300px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1]]
| [[Image:Twinx.jpg |frame|x300px|The service area during the installation of the twin Pegasus. The units have just been rolled into the lab on July 3rd 2018.]]
| [[Image:Peg3and4 front.JPG |frame|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations]]
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| align="center" | DRIE-Pegasus 1
| align="center" | DRIE-Pegasus 1
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