Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 136: | Line 136: | ||
*O<sub>2</sub>: 200 sccm | *O<sub>2</sub>: 200 sccm | ||
*C<sub>4</sub>F<sub>8</sub>: 400 sccm | *C<sub>4</sub>F<sub>8</sub>: 400 sccm | ||
*Ar: 283 sccm | |||
*He: 500 sccm | |||
*CF<sub>4</sub>: 100 sccm | |||
*H2: 100 sccm | |||
| | | | ||
| | | | ||