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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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|style="background:lightgrey; color:black"|
|style="background:lightgrey; color:black"|
{|
{|
| width="50"| SF<sub>6</sub>
*SF<sub>6</sub>: 1200 sccm
| width="50"| O<sub>2</sub>
*O<sub>2</sub>: 200 sccm
| width="50"| C<sub>4</sub>F<sub>8</sub>
*C<sub>4</sub>F<sub>8</sub>: 400 sccm
|-  
|-  
| width="50"| Ar
| width="50"| Ar
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