Specific Process Knowledge/Characterization/Profiler: Difference between revisions

Nanolab staff check the instrument's measurement accuracy with a standard step height of 917 nm for the three smaller ranges and 24.925 µm for the three ranges, so that the two middle ranges are checked with both standards. The 95 % confidence intervals for the standards are 17 nm for the 917 nm standard and 0.072 µm for the 24.925 µm standard. If the control measurement is beyond the limit set in our Quality Control procedure, the instrument is calibrated and the users informed (see LabManager for details on the [http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 control instruction] and the [https://labmanager.dtu.dk/view_binary.php?type=data&mach=304 control measurement data]).  

All this means that the 95 % confidence interval of a 1 µm step measured with the 6.5 kÅ range is at least the 1.8 % error of the standard step while the 95 % confidence interval of a 25 µm step measured with the largest range is at least on the order of the 0.29 % error of the standard step. Steps between 1 and 25 µm measured with the intermediate ranges will presumably have an intermediate error ''just due to the calibration uncertainty'' while the calibration-related uncertainty is presumably larger percentagewise for smaller or larger steps.