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Specific Process Knowledge/Characterization/Profiler: Difference between revisions

Reet (talk | contribs)
Reet (talk | contribs)
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|style="background:LightGrey; color:black"|Resolution x y
|style="background:LightGrey; color:black"|Resolution x y
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Down to 0.003 µm in theory, but in practice limited by the 5 µm radius of the tip
Down to 0.003 µm theoretically, in practice limited by the tip radius
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|style="background:LightGrey; color:black"|Resolution z
|style="background:LightGrey; color:black"|Resolution z