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Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,736 edits
Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,736 edits
Line 402: Line 402:
|style="background:LightGrey; color:black"|Resolution x y
|style="background:LightGrey; color:black"|Resolution x y
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
Down to 0.003µm
Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size)
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|style="background:LightGrey; color:black"|Resolution z
|style="background:LightGrey; color:black"|Resolution z
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|style="background:LightGrey; color:black"|Maximum sample thickness
|style="background:LightGrey; color:black"|Maximum sample thickness
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
100mm
100 mm
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