Specific Process Knowledge/Thin film deposition/Deposition of Chromium: Difference between revisions
| Line 60: | Line 60: | ||
*6x6" wafers | *6x6" wafers | ||
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* | *4x 2" wafer or | ||
*1x 4" wafers or | *1x 4" wafers or | ||
*1x6" wafer or | |||
*Several smaller pieces | *Several smaller pieces | ||
*In theory up to 8" wafer (or 2x4" wafer) but uniformity will be bad | |||
| | | | ||
*1x6" wafers | *1x6" wafers | ||
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| Takes approx. 20 min to pump down | | Takes approx. 20 min to pump down | ||
| Takes approx. 1 hour to pump down | | Takes approx. 1 hour to pump down | ||
| | | Takes approx. 20 min to pump down | ||
| | | | ||
| Takes approx. 5 min to pump down load lock and 6 min for transfer to processing chamber | | Takes approx. 5 min to pump down load lock and 6 min for transfer to processing chamber | ||