Specific Process Knowledge/Thermal Process/E1 Furnace Oxidation (8"): Difference between revisions
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|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
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*800-1100 <sup>o</sup>C | *800 - 1100 <sup>o</sup>C | ||
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|style="background:LightGrey; color:black"|Process pressure | |style="background:LightGrey; color:black"|Process pressure | ||