Specific Process Knowledge/Thermal Process/E1 Furnace Oxidation (8"): Difference between revisions
| Line 63: | Line 63: | ||
|style="background:LightGrey; color:black"|Gas flows | |style="background:LightGrey; color:black"|Gas flows | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*N<sub>2</sub>: 0- | *N<sub>2</sub>: 0-30 slm | ||
*O<sub>2</sub>: 0- | *O<sub>2</sub>: 0-30 slm | ||
*Steamer flow : 0-12.5 slm (Standard recipe is set at 9.5 slm ) | *Steamer flow : 0-12.5 slm (Standard recipe is set at 9.5 slm ) | ||
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