Specific Process Knowledge/Thermal Process/E1 Furnace Oxidation (8"): Difference between revisions
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==Process knowledge== | ==Process knowledge== | ||
*Wet oxidation. More information can be found [[Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation | *Wet oxidation. More information can be found [[Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation E1 furnace|here]] | ||
*Dry oxidation. More information can be found on the [[Specific Process Knowledge/Thermal Process/Oxidation|oxidation page]] | *Dry oxidation. More information can be found on the [[Specific Process Knowledge/Thermal Process/Oxidation|oxidation page]] | ||
*Annealing. More information can be found on the [[Specific Process Knowledge/Thermal Process/Annealing|annealing page]] | *Annealing. More information can be found on the [[Specific Process Knowledge/Thermal Process/Annealing|annealing page]] | ||
==Overview of the performance of Anneal Oxide furnace and some process related parameters== | ==Overview of the performance of Anneal Oxide furnace and some process related parameters== | ||