LabAdviser/314/Microscopy 314-307/FIB/Hydra: Difference between revisions
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'''Attachments''' | '''Attachments''' | ||
- | - PFIB column with unique inductively coupled plasma (ICP) source supporting four ion species with fast switching capability. Ion species available: Xe, Ar, O, N | ||
- | - MultiChem Gas Injection System (GIS) (''for W and Pt both E and I beams. C deposition E beam only. XeF2 and H2O etching Ion beam only.'' '''Check this''') | ||
- | - Thermo Scientific EasyLift™ NanoManipulator for precise in situ sample manipulation | ||
- Everhart-Thornley SE detector (ETD) | |||
- In-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE) | |||
- EDS detector | - EDS detector | ||
- In-chamber Nav-Cam Sample Navigation Camera | |||
- Integrated plasma cleaner | - Integrated plasma cleaner | ||
May have: (need to check) | May have: '''(need to check)''' | ||
- Thermo Scientific CryoCleaner Decontamination Device | - Thermo Scientific CryoCleaner Decontamination Device | ||
- WDS | - WDS | ||
- EBSD | |||
- Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS) | |||
- Elstar Column in-lens SE/BSE detector (TLD-SE, TLD-BSE) | |||
- Elstar Column in-column SE/BSE detector (ICD)* | |||
To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual. | To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual. | ||
Revision as of 11:15, 8 February 2022
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Helios 5 Hydra UX DualBeam
Reading Materials
Technical Notes
Resolution
- Electron beam:
- At optimum WD: 0.7 nm at 1 kV • 1.0 nm at 500 V (ICD)
- At coincident point: 0.6 nm at 15 kV • 1.2 nm at 1 kV
- Xe Ion beam resolution at coincident point:
- <20 nm at 30 kV using preferred statistical method
- <10 nm at 30 kV using selective edge method
Attachments
- PFIB column with unique inductively coupled plasma (ICP) source supporting four ion species with fast switching capability. Ion species available: Xe, Ar, O, N
- MultiChem Gas Injection System (GIS) (for W and Pt both E and I beams. C deposition E beam only. XeF2 and H2O etching Ion beam only. Check this)
- Thermo Scientific EasyLift™ NanoManipulator for precise in situ sample manipulation
- Everhart-Thornley SE detector (ETD)
- In-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)
- EDS detector
- In-chamber Nav-Cam Sample Navigation Camera
- Integrated plasma cleaner
May have: (need to check)
- Thermo Scientific CryoCleaner Decontamination Device
- WDS
- EBSD
- Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS)
- Elstar Column in-lens SE/BSE detector (TLD-SE, TLD-BSE)
- Elstar Column in-column SE/BSE detector (ICD)*
To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual.