Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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| January 2013 | |rowspan="2"| January 2013 | ||
| Travka35, 600 nm oxide, '''35% open''' | |rowspan="2"| Travka35, 600 nm oxide, '''35% open''' | ||
| Process A 110 cycles or 20:10 minutes, '''C01549.04''' | |rowspan="2"| Process A 110 cycles or 20:10 minutes, '''C01549.04''' | ||
| [[file:C01549.04 003mu 0115.jpg |75px|frameless ]] | | [[file:C01549.04 003mu 0115.jpg |75px|frameless ]] | ||
| [[file:C01549.04 003mu 0116.jpg |75px|frameless ]] | | [[file:C01549.04 003mu 0116.jpg |75px|frameless ]] | ||
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| [[file:C01549.04 200mu 0103.jpg |75px|frameless ]] | | [[file:C01549.04 200mu 0103.jpg |75px|frameless ]] | ||
| [[file:C01549.04 300mu 0102.jpg |75px|frameless ]] | | [[file:C01549.04 300mu 0102.jpg |75px|frameless ]] | ||
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{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)''' | | align="center" style="background:#f0f0f0;"|'''Trench width (µm)''' | ||