Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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! width="50" rowspan="2"| Process Information | ! width="50" rowspan="2"| Process Information | ||
! colspan="15"| SEM images of trenches | ! colspan="15"| SEM images of trenches | ||
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! 2 µm | ! 2 µm | ||
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| [[file:C01548.01 200mu0012.jpg |75px|frameless ]] | | [[file:C01548.01 200mu0012.jpg |75px|frameless ]] | ||
| [[file:C01548.01 300mu0011.jpg |75px|frameless ]] | | [[file:C01548.01 300mu0011.jpg |75px|frameless ]] | ||
| | |- | ||
|colspan="15"| | |||
{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;"|'''Trench width''' | | align="center" style="background:#f0f0f0;"|'''Trench width''' | ||