Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
| Line 911: | Line 911: | ||
! 300 µm | ! 300 µm | ||
|- | |- | ||
| January 2013 | !rowspan="2"| January 2013 | ||
| Travka05, AZ 5214, '''5% open''' | !rowspan="2"| Travka05, AZ 5214, '''5% open''' | ||
| Process A 55 cycles or 10:05 minutes, '''C01548.01''' | !rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.01''' | ||
| [[file:C01548.01 002mu0025.jpg |75px|frameless ]] | | [[file:C01548.01 002mu0025.jpg |75px|frameless ]] | ||
| [[file:C01548.01 003mu0026.jpg |75px|frameless ]] | | [[file:C01548.01 003mu0026.jpg |75px|frameless ]] | ||
| Line 1,167: | Line 1,167: | ||
|} | |} | ||
==20:10== | ==20:10== | ||