Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW: Difference between revisions
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|Link2RecipeRun=[[Main Page/Process Logs/jmli/Pegasus3/DREM/DREM 0.2kW newMFC | '''9''']] | |||
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Revision as of 15:42, 2 December 2021
DREM 0.2kW
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | Ar | Coil | Platen | Coil | Platen | ||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||
| DREM 0.2kW | Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | 9 | ||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 2.8 | 2.6 | 100% | 100% | 0.3@5 | 0.5@15 | 25 | 0.3@25 | 5 | 0.3@15 | 0.5@10 | 10 | 1.9@10 | 0.5@20 | 20 | 60 | 60 | 0.25 | 0.25 | 1 | 0.9@1 | 1@20 | 1 | 40 | 50 | 40 | 50 | 38.2 | 53.8 | 38.2 | 53.8 | 0 | ||||||||||